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  • MEMS Mechanical Sensors

    MEMS Mechanical Sensors

    Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of Mems sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart...

     9 p hcmute 19/06/2020 289 1

    Từ khóa: MEMS Mechanical Sensors; Steve P. Beeby, Graham Ensel, Michael Kraft

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