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An Introduction to Microelectromechanical Systems Engineering
Bringing you up-to-date with the latest developments in Mems technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of Mems materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new...
13 p hcmute 19/06/2020 262 1
Từ khóa: An Introduction to Microelectromechanical Systems Engineering; Nadim Maluf, Kirt Williams