Fundamentals of Microfabrication and Nanotechnology - Volume I: Solid-State Physics, Fluidics, and Analytical Techniques in Micro-and Nanotechnology

Focuses on various trends in industrial lithography and pattern transfer. This book covers photo lithography and next generation lithographies and presents a number of subtractive etching techniques, including dry, chemical, and electrochemical wet. It explains thermal, electro thermal, and mechanical removing techniques.
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